Numerical simulation of an RF asymmetric nonthermal plasma reactor used for plasma polymerisation
DOI:
https://doi.org/10.21152/1750-9548.13.2.131Abstract
The aims of this paper is to investigate the control of plasma properties via the geometrical asymmetry effect in a capacitive coupled discharge used for polymer processing. The simulation results prove that the bulk position and density profiles of positive ions, negative ions, and electrons have a clear dependence on geometric asymmetry effect. The underlying mechanisms identified shows a more collisional sheath at the smaller powered surface due to the larger sheath width, and a higher energy at the smaller surface due to the higher mean sheath voltage compared to the larger surface. The argon modelling results are compared to experimental results from the literature for a range of operating conditions. The results show that the argon model results can be used to predict the plasma parameters for other gases used for polymer processing.
References
Safizadeh H., et al., Particle aggregates formed during furfuryl methacrylate plasma polymerization affect human mesenchymal stem cell behavior, Colloids and Surfaces B: Biointerfaces, 2018. 161(261): p. 261-268. https://doi.org/10.1016/j.colsurfb.2017.10.065
Lisovskiy, V.A., N.D. Kharchenko, and V.D. Yegorenkov, Radial structure of low pressure rf capacitive discharges, 2010.Vacuum 84: p. 782–791. https://doi.org/10.1016/j.vacuum.2009.10.037
Benyoucef, D., M. Yousfi, B. Belmadani and A. Settaouti, PIC MC Using Free Path for the Simulation of Low-Pressure RF Discharge in Argon, IEEE Transactions on plasma science, 2010. 38(4): p. 902-908. https://doi.org/10.1109/tps.2010.2042305
Elaissi, S., and al., Electric discharge modelling with the contribution of convection and drift energy effects, Eur.Phys. J.Apply.Phys, 2005. 32: p. 37-44.
COMSOL Multiphysics® software, https://www.comsol.fr, 2018.
Lin, Y.H., and R. Adomaitis, A global basis function approach to DC glow discharge simulation, Technical Research Report, Institute for Systems Research ,1997. T.R. 97-8: P.1-13
Shi, J.J., and M.G. Konga, Mechanisms of the α and γ modes in radio-frequency atmospheric glow discharges, Journal of Applied Physics, 2005. 97, p. 023306-1-023306-6. https://doi.org/10.1063/1.1834978
Bletzinger, P., and A. Garscadden, IEEE Conference on Plasma Science, Williamsburg, VA, June 3–5, 1991.
Overzet, L.J., Microwave Diagnostic Results from the Gaseous Electronics Conference RF Reference Cell, Journal of Research of the National Institute of Standards and Technology, 1995. 100: p. 401-414. https://doi.org/10.6028/jres.100.030
Schüngel, E., and al., Control of plasma properties in capacitively coupled oxygen discharges via the electrical asymmetry effect, Journal of Physics D: Applied Physics, 2011. 44(28): p. 1-22. https://doi.org/10.1088/0022-3727/44/28/285205
Liu, Y.X., and al., Striations in electronegative capacitively coupled radio-frequency plasmas: Effects of the pressure, voltage, and electrode gap, Physics of Plasmas, 2017. 24, 073512: p. 1-32. https://doi.org/10.1063/1.4993603
Michelmore, A., and al., An Experimental and Analytical Study of an Asymmetric Capacitively Coupled Plasma used for Plasma Polymerization, Plasma Process and Polymers, 2014. 11(9): p. 833–841. https://doi.org/10.1002/ppap.201400026
Schulze, J., E. Schüngel and U. Czarnetzki, The electrical asymmetry effect in capacitively coupled radio frequency discharges – measurements of DC self bias, ion energy and ion flux, Journal of Physics D: Applied Physics, 2009. 42 (9). https://doi.org/10.1088/0022-3727/42/9/092005
Bruneau, B., and al., Slope and amplitude asymmetry effects on low frequency capacitively coupled carbon tetrafluoride plasmas, Journal of Applied Physics, 2016. 119, 163301: p. 163301-1 - 163301-10. https://doi.org/10.1063/1.4947453
Published
How to Cite
Issue
Section
Copyright (c) 2019 S Elaissi, H Alyousef

This work is licensed under a Creative Commons Attribution 4.0 International License.